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Variable pressure scanning electron microscopy with energy dispersive X-ray spectroscopy (VP-SEM/EDS)

Energy Dispersive X-Ray Spectroscopy (EDS or EDX) is a chemical microanalysis technique used in conjunction with scanning electron microscopy (SEM). (See Handbook section on SEM.) The EDS technique detects x-rays emitted from the sample during bombardment by an electron beam to characterize the elemental composition of the analyzed volume. Features or phases as small as 1 µm or less can be analyzed.

Fields of application

  • Cultural heritage

    art, painting, textile

  • Natural heritage

    mineral

Materials

  • inorganic

    stone, metal, pigment, plastic, soil

  • organic

    wood, paper, textiles

TOOLS

SEM with EDS / EDX

The Jeol JSM-IT500LA is a variable pressure scanning electron microscope equiped with energy dispersive spectroscopy. The instrument uses a tungsten filament and can yield high quality images of inorganic and organic materials and at variable accelerating voltages from 30 kev to 1 keV. Gold and carbon coating is available.

Contact person
Marei Hacke